Sensorix Satellix

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Sensorix GmbH is a global manufacturer and supplier of electrochemical gas sensors for detecting toxic gases such as NH3, HCl, AsH3, THT, TEOS, Cl2, O3, COCl2, ClO2, HCN, HF, H2, CO. With over 250 years of combined gas sensor experience of its employees, Sensorix offers its B2B-customers effective gas detection solutions to help them to enhance the performance of their gas detectors and increase their reliability.

Sensorix’s customers worldwide appreciate its Quality, Reliability, and Service because Sensorix provides consistent quality with fast lead time. Our highly selective sensors show consistent performance, are long-term stable in all relevant field applications, have a rock-steady baseline even under changing environmental conditions and can thus reliably detect low gas concentrations.

Sensorix offers its gas sensors in the following formats – 4S, 7S, Mini, Classic, Smart and Satellix – and also in customised mechanical adaptations.

Product Information

Gas Sensors For the Semiconductor Industry

The Sensorix Satellix is a special mechanical adaptation of gas sensors for measuring toxic, corrosive and combustible gases.

This is a ready-to-use sensor solution for owners of Satellite XT transmitter with class-leading stability, reliability, and high selectivity.

Key information about the Satellix format

Sensorix offers Satellix sensors in three product dimensions according to the listed gas types. There are electrochemical sensors: Satellix Standard for most gases and Satellix 4S for SO2, NO, NO2, O2, as well as pellistor sensors: Satellix LEL.
All these Satellix sensor formats have a dedicated socket and a programmed EPROM. Thus, owners of Satellite XT devices have a plug-and-play sensor solution.
With Satellix, Sensorix is offering a broad range of sensors for detecting the hydride gases, such as AsH₃, PH₃, SiH₄, B₂H₆, and SeH₂, as well as for HF, HCl, HBr, Cl2, NH3, and H₂, e.g., which are commonly used in semiconductor processes.

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